描述
PLC可接收计数脉冲，频率可高达几k到几十k赫兹。可用多种方式接收这脉冲，还可多路接收。有的PLC还有脉冲输出功能，脉冲频率也可达几十k。有了这两种功能，加上PLC有数据处理及运算能力，若再配备相应的传感器（如旋转编码器）或脉冲伺服装置（如环形分配器、功放、步进电机），则完全可以依NC的原理实现种种控制。
VARIAN BASE, ARC CHAMBER E17201770
AMAT COVER RING, MC HIGH PROFILE LOCKING ULT 0200-05711
AMAT WFB ASSY, CDM4 Wafer Bias 0090-A0700
KLA TANCOR PCB, DVM 54-0014
AMAT 12″”-8 SIZES PSL WAFER PACKED 0270-a0002
TEL HEATER ASSY 3M87-039449-11
AMAT EXCHANGER, HEAT WATER COOLED 752-16-002
YOUNG TOUCHSTONE HEAT EXCHANGER WATER COOLED YT357206
VARIAN SUPPORT, STEM WELDMENT E17097870
BUCHANAN ACTUATOR, SPIN LIFT SMA RCS-SMR-I-150-M-250-T1
BROOKS ASSY, POWER FAULT MANAGER MODULE 002-4037-02
