描述
从结构上分，PLC分为固定式和组合式（模块式）两种。固定式PLC包括CPU板、I/O板、显示面板、内存块、电源等，这些元素组合成一个不可拆卸的整体。模块式PLC包括CPU模块、I/O模块、内存、电源模块、底板或机架，这些模块可以按照一定规则组合配置。
KLA-Tencor Mark II Right Top Plate 740-680567-000 New
KLA-Tencor Newport AIT2 Air Slit Assembly 393215 New
KLA-Tencor HRP340 M3-Etch 456357 Etch Assembly Working
KLA-Tencor HRP-340 Controller 0020839-000 working
KLA-Tencor AIT 2 Upper Opto-Mech Assy. 0024755-000
KLA-Tencor 2365 Sensor Board 0062204-001 working
KLA-Tencor Objective Mount 760-321062-001Untested
KLA-Tencor Retrofit Optics Beamsplitter 0099602-001 New
NEAT 330UP Motion Controller KLA-Tencor CRS1010
KLA TENCOR 2131 WAFER DEFECT INSPECTION SYSTEM
