描述
功能流程图的单流程结构形式简单，如图1所示，其特点是：每一步后面只有一个转换，每个转换后面只有一步。各个工步按顺序执行，上一工步执行结束，转换条件成立，立即开通下一工步，同时关断上一工步。用顺序控制指令来实现功能流程图的编程方法，在前面的章节已经介绍过了，在这里将重点介绍用中间继电器M来记忆工步的编程方法。
AMAT HEAT EXCHANGER AMAT 0 ENDURA SYSTEM P544
CTI-CRYOGENICS 8300 compressor, 8001 controller
CTI-CRYOGENICS 8300 compressor, 8004 controller
Seiko Seiki Turbo Controller unit STP-H1000C lots of 2
CTI CRYOGENICS 8033165 CRYO PUMP 8, looks very clean
18 used Tylan FC-260 MFC, H2, O2, HCl, Cl2, WF6
EDWARDS QDP80 DRY VACUUM PUMP + AMAT CONTROLLER BOX
EDWARDS QDP80 DRY VACUUM PUMP with controller box
BOC EDWARDS QDP80 DRY VACUUM PUMP 208V + CONTROLLER BOX
Lot of 10 MFC, UNIT UFC-1660, N2, He, Unit MFC
Lot of 10 MFC, UNIT UFC-1660, N2, Cl2, O2 Unit MFC
BOC Edwards Dry Vacuum Pump QDP80, and Blower, untested
ENI Genesis GW5002MA-F1H131-A3 3000W RF Generator W/Cal
