描述
PROFIBUS-DP主从接口、RAM容量、温度范围等)，并最好在西门子公司的技术支持下进行，以获得合理的选型；四是编程软件的选择，这主要考虑对CPU的支持状况，我们的体会是：STEP7 V4.0对有些型号的CPU不支持，硬件组态时会发生故障出错，而STEP7V5.0则不存在这种问题。
MKS Spectra HPQ2 and Spectra Vacuum Controller, RGA
MFC UFC-8160, N2 3 SLM, NH3 300 SCCM, lots of 2 used
Tylan 2900 MFC FC-2900M-EP, Ar 20 SLPM lots of 2 used
DAS-1801HC/1802HC 14257 REV A PC8632 BOARD
NATIONAL INSTRUMENTS GPIB-1014P
PT MVME 340B 84-W8787B01C
DMA-W CONTROLLER WESSELS/WOLEVER
TEKTRONIX HANDLER INTERFACE BD. 59-0550-01
SIEMENS 6EW1380-4AB01 POWER SUPPLY STROMVERSORGUNG
Tylan General CMLA-21 Pressure Sensor 0-100 TORR
MICROCON RINSER CONTROLLER C15S
HINE DESIGN BOARD ASSY 778-11, FAB 777, REV H
BROOKS Mass Flow Controller 5850, HCL3, 0-20 MLST/MIN
PRI BM06241 COMP SIDE REV F PB02807 BOARD
Mass Flow Meter 1258B, N2 gas, lots of 2 used
SVG 80166F2-01 STATION CPU BOARD
