描述
当X1和X2同时接通，则Y1断开。图5-3b为起动优先程序，即当X1和X2同时接通，则Y1接通。起保停程序也可以用置位（SET）和复位（RST）指令来实现。在实际应用中，起动信号和停止信号可能由多个触点组成的串、并联电路提供。
MKS Spectra vacuum controller LM59, lot’s of 3
STEC LF-410A, TEPO 4.0 g/min Liquid Flow Controller
Tylan MFC FC-280, PC-580, N2O,N2,NH3,HE lots of 4
Neslab Chiller HX-75A, LAM 778-250779-00, No Compressor
Neslab Chiller HX-75A, TU-1 pump, No Compressor
UNIT UFC-1660, N2, SF6, Ar, lots of 3 used, as is
Leybold Quadruvac Q100 mass spectrometer, with cables
MITSUBISHI PLC A1S62PN, A1SHCPU, A1SX41, A1SX81, A1SY10
MOTOROLA MVME 2304-900, 147-011 84-W8964B01G, PCB
AMAT 0226-97904 Throttle valve for Etch Chamber, New
3 SMC NP420-DN1 SERIAL INTERFACE UNIT, SMC Manifold
