描述
定时时间为1h的梯形图及时序图，辅助继电器M1用于定时启停控制，采用两个0.1s定时器T14和T15串级使用。当T14开始定时后，经1800s延时，T14的常开触点闭合，使T15再开始定时，又经1800s的延时，T15的常开触点闭合，Y4线圈接通。从X14接通，到Y4输出，其延时时间为1800s+1800s=3600s=1h
Hine Design Process Chamber Elevator P/N 94-1118
2 Applied materials 0100-00423 GPLIS seriplex I/O Dist
NEW CTI-CRYOGENICS ADSORBER COMPRESSOR 8500, 8510, 9600
STEC 0.2g/min TEPO LFC LF-310A-EVD, calibration sheet
Advanced energy 2279-002-A
MFC Brooks 5866 N2 RT series, For Novellus gas box
vacuum chamber interface Flange, look very clean
STEC Inc MFT-20
Tylan 2900 MFC FC-2900M, CF4, He, CF4, CL2, lot’s of 4
3 THORNTON DOT TWO RESISTIVITY INDICATOR CONTROLLER
