描述
五种标准化编程语言:顺序功能图(SFC)、梯形图(LD)、功能模块图(FBD)三种图形化语言和语句表(IL)、结构文本(ST)两种文本语言。选用的编程语言应遵守其标准(IEC6113123),同时,还应支持多种语言编程形式,如C,Basic等,以满足特殊控制场合的控制要求。
TYLAN FC-3926V NSFP FC3926V
TYLAN FM-3921V NSFP FM3921V
TYLAN FM-3926V NSFP FM3926V
Tylan 2950 MFC Lot FC-2950MEP5-4V untested 500sccm
AMAT KIT ARGON BLEED TYLAN MFC 9240-03580ITL
Tylan 2900 MFC FC-2900M, CF4, He, CF4, CL2, lot’s of 4
Tylan MFC FC-280, PC-580, N2O,N2,NH3,HE lots of 4
Tylan General CMLA-11S02 10 Torr Manometer Lam 4520
TYLAN FC-125KZ USPP FC125KZ
TYLAN FM-225KZ USPP FM225KZ
Tylan / Millipore FC-2960M Mass Flow Controller NEW
Tylan General CMLA-21 0-100 Torr Manometer with Cert.
TYLAN MICRO CVD CONTROL BD 118730-008
TYLAN 2979M Mass Flow Controller FC-2979MEP5-WM, Gas O2