描述
压厂用电源子组项：该子项包括压厂用工作及备用分支等；低压厂用电源子组项：该子组项包括6kV所联接的厂用变压器的6 kV侧断路器、380V侧断路器及380V侧分段断路器等；保电源子组项：该子组项包括保段的工作及备用进线的断路器、仪控变进线断路器及仪控分段断路器等；
VACUUBRAND VACUUM PUMP SYSTEM MZ 2C VARIO PUMP VNC 1
MILLIPORE ZLXS6V03Y ELIX 3 ELIX3 MILLI-Q UV ULTRAVIOLET
NEW PARKER BD15JALNE15 SERVO VALVE
GALIL DMC-2120 MOTION CONTROLLER W/ ICM-2900 I/O MODULE
FRISTAM FZX2150 SANITARY LIQUID RING PUMP 7.5 HP
PARTICLE MEASURING SYS AIR PARTICLE COUNTER LASAIR 310
LUXTRON 1015 DS ENDPOINT CONTROLLER FOR DRY ETCH 1015DS
NEW AMAT LCAT200P-20001 CASSETTE ALIGNMENT TOOL
NEW FANUC A06B-0342-B221 AC SERVO MOTOR MODEL SF
NEW FANUC A06B-0315-B051 AC SERVO MOTOR MODEL SF
HONEYWELL 51305406-100 UCIO PC BOARD UNIVERSAL I/O MOD
NEW COMPUMOTOR 4000 MOTION CONTROLLER AND TOUCH PANEL
NEW ALLEN BRADLEY SCANNER CONNECT TWO CHANNEL 1784KTXD
ALLEN BRADLEY 1785-L30B/A PLC5/30 PROCESSOR MODULE
