描述
又称字移位指令，本指令是以字（通道）为单位的串行移位。操作数为首通道号D1，末通道号D2。可取000CH~019CH,200CH~252CH,HR00~HR19。通道移位指令执行时，当移位条件为ON，WSFT从首通道向末通道依此移动一个字，原首通道16位内容全部复位，原末通道中的16位内容全部移出丢失。
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KLA-Tencor AIT2 Wafer APS3.1 Board 0016302-000 AB
KLA-Tencor AIT1 Robot Distr. Assy. PCB 530352 Working
KLA-Tencor AIT1 Olympus Microscope Assembly Working
