描述
S7-300 PLC模拟量模块可通过变换信号类型卡支持各种类型信号。当改造老生产工艺线时，不可避免地会遇到多类信号。因此，设计时最好不把几种信号接到同一模块；同时必须先组态好模块，再接信号线，检查无误后送电。此外，应避免两线制与四线制信号、电流与电压信号的混接，以免烧坏模块。
LINTEC Liquid flow controller, TEOS, 0.1g/min used
Horiba Stec LF-310A-EVD TEPO 0.1g/min Liquid mass meter
Tylan 2900 MFC FC-2900M-EP, N2, 20 SLPM, lot’s of 2
Tylan 2900 MFC FC-2900M-EP, O2, 20 SLPM, lot’s of 2
RF MATCHING UNIT VSP-0971
Aera MFC FC-7800CD, SiH4 200 SCCM looks very clean
CTI-Cryogenics On Board P300 Module 8113160G001, 2 unit
TEMP CONTROLLER INR-244-402 WITH Omron BU SO4X
AMAT 0010-04926 HV Module CESC, untested
Jennings UCS-200-15S and CVCJ-1000-3S, looks very clean
Tylan General CMS-11S02, 0-10 TORR, lots of 2
