描述
继电器控制逻辑使用了大量的机械触点，连线也多，可靠性和可维护性差。而PLC采用微电子技术，大量的开关动作由无触点的半导体电路来完成，PLC还配有自检和监督功能，可靠性和可维护性好。
Nikon Scanner Prism Unit 4L990-797AN working
Nikon S306 Depolarizer 4L991-783AN new
CTI-Cryogenics High Capacity Compressor 8128903G004
Osaka Vacuum Turbopump Set TH542, TH532ASAW untested
AMAT Ion Source Indirectly Heated Cathode 0011-92437
Varian TV 301 Vacuum Turbopump 7698918 new
TEL ACT 12 DC Power Supply TDK MSE181E working
TEL ACT 8 DC Power Supply TDK MSE343B working
AE E’Wave Bipolar DC Power Supply 3152603-014D rebuilt
Manifold Indexer Assy. SX6082 AMAT XR80 0520-90006
Yaskawa 300mm Prealigner XU-ACP130-B11 new
Yaskawa Dual Arm Trnsfr Robot XU-RCM7220 new 0190-25393
Agilent Logic Analysis System 16702B working
KLA-Tencor AIT 2 Optics Module 0099610-000 untested
