描述
从控制速度上看，继电器控制系统依靠机械触点的动作以实现控制，工作频率低，机械触点还会出现抖动问题。而PLC通过程序指令控制半导体电路来实现控制的，速度快，程序指令执行时间在微秒级，且不会出现触点抖动问题。
Pfeiffer TCP 600 Turbo pump Controller
ENI DCG-200 DC Plasma Generator, AMAT 0190-08033
AE Advanced Energy MDX-20K Master 3152223-003-Y, used
AE Advanced Energy MDX-20K Master, AE Model 3152223-003
AE Advanced Energy MDX-10K Master, AE Model 3152012-041
LAM 852-014681-583 RF Generator ENI OEM-6A-11491-52
Advanced energy 2026-000-D, ASM LDM PLASMA Generator
VARIAN Turbo-V 250 MACRO TORR turbo pump 969-9007S004
AE RFPP LF-5 RF Generator and RFPP ATL-100RA RF Match
ENI OEM-12A-21041-51 RF Generator, 1250W at 13.56 MHz
ENI OEM-12B-01 RF Generator, 1250W at 13.56 MHz, used
