描述
电气设备电气系统的联锁逻辑较简单，但电气设备本身操作机构复杂。因此，机组的电气系统纳入DCS控制，要求控制系统具有很的可靠性。除了能实现正常起停和运行操作外，尤其要求能够实现实时显示异常运行和事故状态下的各种数据和状态，并提供相应的操作指导和应急处理措施，保证电气系统自动控制在合理的工况下工作。
Stokes 1721 Vacuum System, 615 blower w/ 212H-11 pump
ATMI Ecosys CDO 862 Abatement System Used
Edwards iGX600N Dry Vacuum Pump Refurbished Unused
Edwards iGX600 Dry Vacuum Pump Refurbished Unused
ATMI Ecosys Vector Ultra 3000 Abatement System Used
AM&D Vacumizer 100, Ametek 7.5HP, 480V Vacuum Pump Good
MKS Portable Vacuum Calibration System PVS-6 Baratron
NASH CL9002 VACCUM PUMP TEST #85S0182 CAST IRON POS 1
PreVac GDF-950 50hp Liquid Ring Rotary Vacuum Pump NICE
Vactronic PECVD Plasmatherm Etch Tool Oxford Novellus
Stokes Microvac 612-30 Vacuum Pump, 612 CFM, 20HP Mint!
Pfeiffer Balzers, Gas and Vacuum Station, Working
NASH CL9002 VACCUM PUMP TEST # 7041 CAST IRON NASH
